Semiconductor Expertise
Specialized in Ultra-Pure Titanium Components
UHV Compatibility
Minimal outgassing titanium components for ultra-high vacuum chambers
Ultra-Pure Processing
Dedicated cleanroom for semiconductor-grade component manufacturing
Precision Tolerances
Tight dimensional tolerances for wafer handling and process tooling
Surface Finish Excellence
Controlled surface finishes for particle-free semiconductor environments
Semiconductor Titanium Grades
Approved Alloys for Semiconductor Equipment
| Alloy | Applications |
|---|---|
| Ti-6Al-4V (Grade 5) | Vacuum chamber walls, structural components, gas distribution plates |
| Ti-6Al-4V ELI (Grade 23) | High-purity process components, wafer handling end-effectors |
| CP-Ti Grade 2 | Chemical delivery systems, wet process components, liners |
| Ti-6242 | High-temperature process chamber components |
Quality Systems
Certifications & Compliance
ISO 9001ASTM B265ASTM B348UHV CompatibleRoHSREACHCMM
Neutral engineering reference
Explore Titanium Engineering Knowledge
Neutral, vendor-independent technical guidance on titanium applications, grades, and standards to support your engineering decisions.