Solutions
Semiconductor Titanium Solutions
Ultra-clean titanium components for semiconductor fabrication equipment, including vacuum chambers, wafer handling parts, and precision fixtures.
Overview
Semiconductor fabrication demands materials that resist corrosion, minimize particle generation, and maintain dimensional stability. Titanium’s natural oxide layer and non-magnetic properties make it ideal for critical semiconductor equipment components.
capabilities
- Vacuum Chambers: Ultra-clean welded titanium chambers for deposition and etch tools
- Wafer Handling: End effectors, grippers, and transport components
- Precision Fixtures: Lithography and inspection tooling
- Gas Distribution: Fittings, manifolds, and delivery system components
Quality Standards
- Cleanroom-compatible manufacturing
- Surface finish to Ra < 0.4 µm
- Ultrasonic cleaning and vacuum packaging
- Full material certification and traceability
Neutral engineering reference
Continue exploring the titanium knowledge base
Neutral, vendor-independent technical guidance on titanium grades, processes, and standards to support your engineering decisions.